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Atomic Layer Deposition for Semiconductors

Language EnglishEnglish
Book Paperback
Book Atomic Layer Deposition for Semiconductors Cheol Seong Hwang
Libristo code: 13809644
Publishers Springer-Verlag New York Inc., August 2016
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, mov...
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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.

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About the book

Full name Atomic Layer Deposition for Semiconductors
Author Cheol Seong Hwang
Language English
Binding Book - Paperback
Date of issue 2016
Number of pages 263
EAN 9781489979438
ISBN 1489979433
Libristo code 13809644
Publishers Springer-Verlag New York Inc.
Weight 482
Dimensions 234 x 155 x 18

Categories

Mathematics & Science > Chemistry > Physical chemistry > Electrochemistry & magnetochemistry
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Computing & Information Technology > Computer hardware > Storage media & peripherals
Computing & Information Technology > Computer science > Computer architecture & logic design
Technology, Engineering, Agriculture > Energy technology & engineering
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