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Lithography

Name: Lithography
Brand: In Tech
SKU: 24118972
Price: 155.31 EUR
Availability: InStock
Author: Michael Wang
ISBN: 9789533070643

Michael Wang

Language

English

Book Hardback

Libristo code: 24118972

Publishers In Tech, February 2010

Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in... Full description

Libristo code: 24118972

376 b

155.31 €

In stock at our supplier Shipping in 10-13 days

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Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits.

This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.