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MEMS Materials and Processes Handbook

Language EnglishEnglish
Book Hardback
Book MEMS Materials and Processes Handbook Reza Ghodssi
Libristo code: 01202093
Publishers SPRINGER PG, June 2011
This comprehensive reference on materials, properties, and specific processes for MEMS fabrication i... Full description
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This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.

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About the book

Full name MEMS Materials and Processes Handbook
Author Reza Ghodssi
Language English
Binding Book - Hardback
Date of issue 2011
Number of pages 1224
EAN 9780387473161
ISBN 0387473165
Libristo code 01202093
Publishers SPRINGER PG
Weight 1843
Dimensions 159 x 240 x 73

Categories

Mathematics & Science > Chemistry > Physical chemistry > Surface chemistry & adsorption
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronics: circuits & components
Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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