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MEMS

Design and Fabrication

Language EnglishEnglish
Book Hardback
Book MEMS Mohamed Gad-El-Hak
Libristo code: 06705780
Publishers Taylor & Francis Inc, November 2005
Details the techniques, technologies, and materials involved in designing and fabricating MEMS devic... Full description
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Details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. This volume offers an overview of MEMS materials and examines various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB[registered] technology, and deep reactive ion etching.

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About the book

Full name MEMS
Author Mohamed Gad-El-Hak
Language English
Binding Book - Hardback
Date of issue 2005
Number of pages 664
EAN 9780849391385
ISBN 9780849391385
Libristo code 06705780
Publishers Taylor & Francis Inc
Weight 1153
Dimensions 178 x 254 x 37

Categories

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering
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