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Micro and Nano Fabrication

Tools and Processes

Language EnglishEnglish
Book Hardback
Book Micro and Nano Fabrication Hans-Heinrich Gatzen
Libristo code: 05158609
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, January 2015
For Micro and Nano Electro-Mechanical Systems (MNEMS) production, each product requires a unique pro... Full description
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For Micro and Nano Electro-Mechanical Systems (MNEMS) production, each product requires a unique process technology.§This book provides a comprehensive insight into the tools required for fabricating MNEMS systems and the process technologies applied. Besides, it describes the enabling technologies which are necessary for successful production, i.e., wafer planarization and bonding, cleanroom, or gas and surface analysis.

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About the book

Full name Micro and Nano Fabrication
Author Hans-Heinrich Gatzen, Volker Saile, Juerg Leuthold
Language English
Binding Book - Hardback
Date of issue 2015
Number of pages 519
EAN 9783662443941
ISBN 3662443945
Libristo code 05158609
Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Weight 952
Dimensions 164 x 240 x 31

Categories

Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
Technology, Engineering, Agriculture > Technology: general issues > Nanotechnology
Technology, Engineering, Agriculture > Industrial chemistry & manufacturing technologies > Other manufacturing technologies
Technology, Engineering, Agriculture > Mechanical engineering & materials > Engineering skills & trades
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