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Micro Electronic and Mechanical Systems

Name: Micro Electronic and Mechanical Systems
Brand: In Tech
SKU: 24118941
Price: 155.02 EUR
Availability: InStock
Author: Kenichi Takahata
ISBN: 9789533070278

Kenichi Takahata

Language

English

Book Hardback

Libristo code: 24118941

Publishers In Tech, December 2009

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that pr... Full description

Libristo code: 24118941

376 b

155.02 €

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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.