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Microsystem Technology and Microrobotics

Name: Microsystem Technology and Microrobotics
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 01566064
Price: 154.55 EUR
Availability: InStock
Author: Sergej Fatikow
ISBN: 9783540606581

Sergej Fatikow

Ulrich Rembold

Language

English

Book Hardback

Libristo code: 01566064

Publishers Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, March 1997

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic,... Full description

Libristo code: 01566064

373 b

154.55 €

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.