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Mikromechanik

Mikrofertigung mit Methoden der Halbleitertechnologie

Language GermanGerman
Book Paperback
Book Mikromechanik Anton Heuberger
Libristo code: 07019821
Publishers Springer, Berlin, November 2011
Mikromechanik behandelt die physikalischen Grundlagen dieser jungen, zukunftsträchtigen Disziplin, i... Full description
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Mikromechanik behandelt die physikalischen Grundlagen dieser jungen, zukunftsträchtigen Disziplin, ihre Technologie, aufbauend auf der Siliziumtechnologie, und ihre Nutzung in den verschiedensten Anwendungen der Bereiche Sensorik, Aktuatorik und integrierte Optoelektronik. Das Buch ist unentbehrlich für jeden, der sich intensiv mit der Mikromechanik befassen will; für den Studierenden ebenso wie für den Ingenieur in der Praxis oder den interessierten Laien.

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About the book

Full name Mikromechanik
Author Anton Heuberger
Language German
Binding Book - Paperback
Date of issue 2012
Number of pages 501
EAN 9783642466229
ISBN 3642466222
Libristo code 07019821
Publishers Springer, Berlin
Weight 893
Dimensions 170 x 244 x 27

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Production engineering
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