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Nanofabrication

Name: Nanofabrication
Brand: Springer Verlag GmbH
SKU: 01705636
Price: 153.34 EUR
Availability: InStock
Author: Maria Stepanova
ISBN: 9783709104231

Techniques and Principles

Maria Stepanova

Steven Dew

Language

English

Book Hardback

Libristo code: 01705636

Publishers Springer Verlag GmbH, November 2011

Intended to update scientists and engineers on the current state of the art in a variety of key tech... Full description

Libristo code: 01705636

373 b

153.34 €

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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.