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Optimal Synthesis Methods for MEMS

Language EnglishEnglish
Book Hardback
Book Optimal Synthesis Methods for MEMS S.G.K. Ananthasuresh
Libristo code: 01418093
Publishers Springer-Verlag New York Inc., November 2003
This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapt... Full description
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175.92
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This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically.

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