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Specialty Gas Analysis - A Practical Guidebook
Language
English
English
Book
Hardback
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance o...
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Libristo code: 04888313
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The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.
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About the book
Full name
Specialty Gas Analysis - A Practical Guidebook
Author
Jeremiah D. Hogan
Language
English
English
Binding
Book - Hardback
Date of issue
1997
Number of pages
200
EAN
9780471185987
ISBN
0471185981
Libristo code
04888313
Publishers
John Wiley & Sons Inc
Weight
468
Dimensions
159 x 241 x 19
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