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Spectroscopic Ellipsometry - Principles and Applications

Language EnglishEnglish
Book Hardback
Book Spectroscopic Ellipsometry - Principles and Applications Hiroyuki Fujiwara
Libristo code: 04878436
Publishers John Wiley & Sons Inc, January 2007
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semicond... Full description
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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About the book

Full name Spectroscopic Ellipsometry - Principles and Applications
Author Hiroyuki Fujiwara
Language English
Binding Book - Hardback
Date of issue 2007
Number of pages 392
EAN 9780470016084
ISBN 0470016086
Libristo code 04878436
Publishers John Wiley & Sons Inc
Weight 762
Dimensions 157 x 235 x 26

Categories

Mathematics & Science > Physics > Optical physics
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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