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Surfaces, Interfaces, and Thin Films for Microelectronics

Language EnglishEnglish
Book Hardback
Book Surfaces, Interfaces, and Thin Films for Microelectronics Eugene A. Irene
Libristo code: 01388110
Publishers John Wiley & Sons Inc, March 2008
This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics... Full description
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203.67
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This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this bookoffers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications.

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About the book

Full name Surfaces, Interfaces, and Thin Films for Microelectronics
Language English
Binding Book - Hardback
Date of issue 2008
Number of pages 536
EAN 9780470174470
ISBN 0470174471
Libristo code 01388110
Weight 872
Dimensions 160 x 241 x 31
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