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Thin Films Material Technology

Sputtering of Compound Materials

Language EnglishEnglish
Book Paperback
Book Thin Films Material Technology Kiyotaka Wasa
Libristo code: 01651243
Publishers Springer, Berlin, November 2012
An invaluable resource for industrial science and engineering newcomers to sputter deposition techno... Full description
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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts.§Key topics: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses; Covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.

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About the book

Full name Thin Films Material Technology
Language English
Binding Book - Paperback
Date of issue 2013
Number of pages 518
EAN 9783642059315
ISBN 3642059317
Libristo code 01651243
Publishers Springer, Berlin
Weight 777
Dimensions 152 x 28 x 27
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