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Introductory MEMS

Fabrication and Applications

Language EnglishEnglish
Book Hardback
Book Introductory MEMS Thomas M. Adams
Libristo code: 01380768
Publishers Springer-Verlag New York Inc., December 2008
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It descri... Full description
? points 244 b
100.85
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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.

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