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Introductory MEMS

Fabrication and Applications

Language EnglishEnglish
Book Paperback
Book Introductory MEMS Thomas M. Adams
Libristo code: 09201356
Publishers Springer-Verlag New York Inc., September 2014
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It descri... Full description
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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.§

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